Abstract: Dependency of asymmetric etched profiles on open-ratio and pattern-size within the wafer was studied in a magnetic Very High Frequency (VHF) Plasma etching system for high aspect-ratio ...
Abstract: Bevel etch used during wafer fabrication for semiconductor devices is discussed. In this paper, the bevel etch process was utilized in middle of the line processing to reduce back end of ...
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Laser etching stencils for vapor deposition
Shadow masks! We're making micro stencils to use in my sputter coater and talking about how to fabricate them quickly and easily on a fiber laser. Then some examples to see how it works and what kind ...
Moving beyond the limits of conventional chip fabrication, a joint China–US research team has unveiled a semiconductor manufacturing method that could, in its words, open entirely new avenues for ...
† Ertl Center for Electrochemistry and Catalysis, Research Institute for Solar and Sustainable Energies (RISE), Gwangju Institute of Science and Technology (GIST), Gwangju 500-712 South Korea ‡ ...
At least 67,800 years ago, someone placed their hand on the wall inside a limestone cave and used a reddish-brown pigment to trace the outline of a handprint. But the unknown artist didn’t stop there: ...
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